个人简介

陈远流，广东潮州人。流体动力基础件与机电系统全国重点实验室副主任、研究员、博士生导师，教育部青年长江学者，杭州市青联副主席，国际生产工程科学院（CIRP）通讯会员，中国机械工程学会高级会员、极端制造分会委员。日本机械工程学会（JSME）青年研究学者奖、中国工程前沿杰出青年学者、中国刀协切削先进技术研究会青年新秀奖获得者。CIRP Journal of Manufacturing Science and Technology、IEEE Transactions on Industrial Electronics、Optics Express等期刊同行评审专家。国家自然科学基金同行评审专家、国家高层次人次计划评审专家、国家重点研发计划会评专家。主要研究领域包括超精密加工/测量技术及装备、先进检测技术与控制、微纳制造、智能精密机电系统等。

近年来主持承担了国家重点研发计划、国家自然科学基金联合基金重点项目等国家科研任务10余项，研究成果在CIRP Annals, Measurement Science and Technology等期刊上发表SCI论文60余篇，授权发明专利20余项。研制出多种适用于跨尺度、超精密制造过程的高性能测量测试设备，并将成果应用于国家重要战略领域。成果获得中国机械工业科学技术奖一等奖2项（2013年，2020年），浙江省科学技术奖（技术发明）一等奖1项（2021年），教育部科学技术奖二等奖1项。

研究领域：

先进制造精密工程学：包括超精密加工技术及装备、微纳检测与控制、原子级制造等。

发表论文

[1] Y.L. Chen, Y. Xu, Y. Shimizu, H. Matsukuma and W. Gao. High quality-factor quartz tuning fork glass probe used in tapping mode atomic force microscopy for surface profile measurement. Measurement Science and Technology. 2018. Accepted and In Press. doi.org/10.1088/1361-6501/aab998

[2] Y. L. Chen, Y. Machida, Y. Shimizu, H. Matsukuma and W. Gao. A stitching linear-scan method for roundness measurement of small cylinders. CIRP Annals-Manufacturing Technology. 2018. Accepted and In Press.

[3] Y.L. Chen, Z. Niu, D. Matsuura, J.C. Lee, Y. Shimizu, W. Gao, J.S. Oh and C.H. Park. Implementation and verification of a four-probe motion error measurement system for a large-scale roll lathe used in hybrid manufacturing. Measurement Science and Technology. 28 (2017) 105004.

[4] Y.L. Chen, Y. Cai, M. Xu, Y. Shimizu and W. Gao. An edge reversal method for precision measurement of cutting edge radius of single point diamond tools. Precision Engineering. 50 (2017), 380-387.

[5] Y.L. Chen, Y. Cai, K. Tohyama, Y. Shimizu and W. Gao. Auto-tracking single point diamond cutting on non-planar brittle material substrates by a high-rigidity force controlled fast tool servo. Precision Engineering. 49 (2017), 253-261.

[6] Y.L. Chen, J. Tamada, Y. Kudo, S. Madokoro, K. Nakamura and W. Gao. Optical frequency domain angle measurement in a femtosecond laser autocollimator. Optics Express.25 (2017), 16725-16738.

[7] Y.L. Chen, Y. Shimizu, Y. Kudo, S. Ito and W. Gao. Mode-locked Laser Autocollimator with an Expanded Measurement Range. Optics Express. 24, 14(2016), 15554-15569.

[8] Y.L. Chen, S. Ito, H.  Kikuchi, Y. Shimizu, W. Gao. On-line qualification of a micro probing system for precision length measurement of micro-features on precision parts. Measurement Science and Technology. 27 (2016): 074008.

[9] Y.L. Chen, Y. Cai, Y. Shimizu, S. Ito, W. Gao, B. F. Ju. Ductile cutting of silicon microstructures with surface inclination measurement and compensation by using a force sensor integrated single point diamond tool.  Journal of Micromechanics and Microengineering 26 (2015): 025002.

[10] Y.L. Chen, Y. Cai, Y. Shimizu, S. Ito, W. Gao, B. F. Ju. On-machine measurement of microtool wear and cutting edge chipping by using a diamond edge artifact. Precision Engineering 43 (2015): 462-467.

[11] Y.L. Chen, Y. Shimizu, S. Wang, S. Ito, B.F. Ju，W. Gao. Self-evaluation of the cutting edge contour of a micro diamond tool with a force sensor integrated fast tool servo on an ultra-precision lathe. International Journal of Advanced Manufacturing Technology 77 (2015): 2257-2267.  

[12] Y.L. Chen, S. Wang, Y. Shimizu, S. Ito, W. Gao, B.F. Ju. An in-process measurement method for repair of defective microstructure by using a fast tool servo with a force sensor. Precision Engineering. 39 (2015): 134-142.

[13] Y.L. Chen, W.L. Zhu, S. Yang, B.F. Ju, Y. Ge. Large-area profile measurement of sinusoidal freeform surfaces using a new prototype scanning tunneling microscopy. Precision Engineering. 38 (2014): 414-420.

 [14] Y.L. Chen, W. Gao, B.F. Ju, Y. Shimizu, S. Ito. A measurement method of cutting tool position for relay fabrication of microstructure surface. Measurement Science and Technology. 25 (2014): 064018.

[15] Y. Cai, Y.L. Chen, M. Xu, Y. Shimizu, S. Ito, H. Matsukuma, W. Gao. An ultra-precision tool nanoindentation instrument for replication of single point diamond tool cutting edges. Measurement Science and Technology, 29 (2018): 054004.

[16] Z. Niu, Y.L. Chen, Y. Shimizu, H. Matsukuma and W. Gao. Error Separation Method for Precision Measurement of the Run-Out of a Microdrill Bit by Using a Laser Scan Micrometer Measurement System. Journal of Manufacturing and Materials Processings. 2(2018), 4.

[17] Y. Cai, Y.L. Chen, Y. Shimizu, S. Ito, W. Gao. Molecular dynamics simulation of subnanometric tool-workpiece contact on a force sensor-integrated fast tool servo for ultra-precision microcutting. Applied Surface Science, 369 (2016): 354–365.

[18] Y. Cai, Y.L. Chen, Y. Shimizu. MD simulation of elastic-plastic transition associated with tool-workpiece contact in FS-FTS. Journal of Engineering Manufacture, (2016), in press. 

[19] Z. Niu, Y.L. Chen, D. Matsuura, J.C. Lee, R. Kobayashi, Y. Shimizu, S. Ito, W. Gao, J.S. Oh and C.H. Park. Precision Measurement of Z-Slide Vertical Error Motion of an Ultra-Precision Lathe by Using Three-probe Method.International Journal of Precision Engineering and Manufacturing. 18 (2017): 651-660.

[20] S. Ito, Y.L. Chen, Y. Shimizu, et al. Uncertainty analysis of slot die coater gap width measurement by using a shear mode micro-probing system. Precision Engineering. 43 (2016): 525-529.

[21] W. Gao, Y.L. Chen, K.W. Lee, Y.J. Noh, Y. Shimizu, S. Ito. Precision tool setting for fabrication of a microstructure array. CIRP Annals - Manufacturing Technology. 2013, 62(1): 523-526.

[22] B.F. Ju, Y.L. Chen, W. Zhang, F.Z. Fang. Rapid measurement of a high step microstructure with 90 degrees steep sidewall. Review of Scientific Instruments. 83 (2012): 013706.

[23] B.F. Ju, Y.L. Chen, W. Zhang, W. Zhu, F.Z. Fang. Long range and accurate measurement of deep trench microstructures by a specialized scanning tunneling microscope. Review of Scientific Instruments. 83 (2012): 056106.

[24] B.F. Ju, Y.L. Chen, Y. Ge. The art of electrochemical etching for preparing tungsten probes with controllable tip profile and characteristic parameters. Review of Scientific Instruments. 82 (2011): 013707.

[25] B.F. Ju, Y.L. Chen, M. Fu, Y. Chen, Y. Yang. Systematic study of electropolishing technique for improving the quality and production reproducibility of tungsten STM probe. Sensors and Actuators A: Physical. 155 (2009): 136-144.

[26] S. Ito, H. Kikuchi, Y.L. Chen, Y. Shimizu, et al. A micro-coordinate measurement machine (CMM) for large-scale dimensional measurement of micro-slits. Applied Sciences-Basel. 6 (2016): 6050156.

[27] Y. Shimizu, Y. Kudo, Y.-L. Chen, S. Ito, and W. Gao. An optical lever by using a mode-locked laser for angle measurement. Precision Engineering, 47 (2016): 72-80.

[28] J. Tamada, K. Yukitoshi, Y.-L. Chen, Y. Shimizu and W. Gao. Determination of the zero-position for an optical angle sensor. Journal of Advanced Mechanical Design Systems and Manufacturing. 10 (2016), 1-10.

[29] Y. Ge, W. Zhang, Y.L. Chen, J. Chao, B.F. Ju. A reproducible electropolishing technique to customize tungsten SPM probe: From mathematical modeling to realization. Journal of Materials Processing Technology. 213 (2013):11-19.

[30] X. Chen, Y. Shimizu, C. Chen, Y.L. Chen, W. Gao. Generalized method for probing ideal initial polarization states in multibeam LIoyd’s mirror interference lithography of 2D scale gratings. Journal of Vacuum Science & Technology B 36 (2018): 021601.